OM
V5 Optical Inspection Equipment Intelligent Automation Upgrade
Solution Capabilities
1. Compatible models for integration and upgrade: Nikon OST3100/3200 and Olympus AL3300/3320.
2. Macro Auto-Capture: Provides wafer images for offline defect review.
3. Micro Auto-Capture: Provides wafer images for offline defect review.
4. Micro Automatic Measurement: Measures Bump CD, Line Width, Overlay, EBR, and WEE with measurement stability within ±1 pixel deviation.
5. Multi-functional configuration meets all quality assurance requirements.
6. Supports both online and offline review software.
7. FAB automation support (OHT + SECS/GEM).
8. AI ADC software (optional).
1. Compatible models for integration and upgrade: Nikon OST3100/3200 and Olympus AL3300/3320.
2. Macro Auto-Capture: Provides wafer images for offline defect review.
3. Micro Auto-Capture: Provides wafer images for offline defect review.
4. Micro Automatic Measurement: Measures Bump CD, Line Width, Overlay, EBR, and WEE with measurement stability within ±1 pixel deviation.
5. Multi-functional configuration meets all quality assurance requirements.
6. Supports both online and offline review software.
7. FAB automation support (OHT + SECS/GEM).
8. AI ADC software (optional).